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제11항에 있어서,상기 산화 금속은 MoO3, MoO, MoO2, WO2, WO3, VO, VO2, V2O3, V2O5, V3O5, NbO, NbO2, Nb2O5, TaO, TaO2, Ta2O5, TiO, TiO2, Ti2O3, Ti3O5, ZrO2, HfO2, TcO2, Tc2O7, ReO2, ReO3, Re2O3, Re2O7, CoO, Co2O3, Co3O4, Rh2O3, RhO2, IrO2, Ir2O3, IrO2·2H2O, NiO, Ni2O3, PdO, PdO2, PtO, PtO2, PtO3, Pt3O4, PtO2·H2O, GaO, Ga2O, Ga2O3, SnO, 및 SnO2 중 적어도 하나를 포함하고;상기 할로겐화 금속은 MoF3, MoF6, MoF4, Mo4F20, MoCl2, MoCl3, MoCl6, MoCl4, MoCl5, MoBr3, MoBr4, MoI2, MoI3, MoI4, WF6, WF4, [WF5]4, WCl2, WCl6, WCl4, [WCl5]2, [W6Cl12]Cl6, WBr3, WBr6, WBr4, WBr5, W6Br14, WI2, WI3, WI4, VF2, VF3, VF4, VF5, VCl2, VCl3, VCl4, VBr2, VBr3, VBr4, VI2, VI3, VI4, NbCl3, NbCl4, NbCl5, NbBr4, NbBr5, NbI3, NbI4, NbI5, TaF3, [TaF5]4, TaCl3, TaCl4, TaCl5, TaBr3, TaBr4, TaBr5, TaI4, TaI5, TiF2, TiF3, TiF4, TiCl4, TiCl3, TiCl2, TiBr3, TiBr4, HfCl4, HfBr2, HfBr4, HfI3, HfI4, ZrF4, ZrCl2, ZrCl3, ZrCl4, ZrBr3, ZrBr4, ZrI2, ZrI3, ZrI4, TcF6, TcF5, TcCl4, TcCl6, TcBr4, ReF6, ReF4, ReF5, ReF7, Re3Cl9, ReCl5, ReCl4, ReCl6, ReBr3, ReBr4, ReBr5, ReI3, ReI4, CoF2, CoF3, CoF4, CoCl2, CoCl3, CoBr2, CoI2, RhF3, RhF6, RhF4, [RhF5]4, RhCl3, RhBr3, RhI3, IrF3, IrF6, IrF4, [IrF5]4, IrCl2, IrCl3, IrCl4, IrBr2, IrBr3, IrBr4, IrI2, IrI3, IrI4, NiF2, NiCl2, NiBr2, NiI2, PdF2, PdF4, PdCl2, PdBr2, PdI2, PtF6, PtF4, [PtF5]4, PtCl2, PtCl3, PtCl4, Pt6Cl12, PtBr2, PtBr3, PtBr4, PtI2, PtI3, PtI4, GaF3, GaCl2, GaCl3, GaBr3, GaI3, SnF2, SnF4, SnCl2, SnCl4, SnBr2, SnBr4, SnI2, 및 SnI4 중 적어도 하나를 포함하고;상기 금속 카보닐 화합물은 Mo(CO)6, W(CO)6, Nb(CO)6, V(CO)6, Ta(CO)6, Ti(CO)6, Zr(CO)7, Tc2(CO)10, Hf(CO)7 Re2(CO)10, Co2(CO)8, Co4(CO)12, Co6(CO)16, Rh2(CO)8, Rh4(CO)12, Rh6(CO)16, Ir2(CO)8, Ir4(CO)12, Ir6(CO)16, Ni(CO)4, Pd(CO)4, 및 Pt(CO)4 중 적어도 하나를 포함하는 금속 칼코게나이드 박막의 제조방법
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